GB/T 14141-2009 Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array

Standard Number: GB/T 14141-2009
Chinese:硅外延层、扩散层和离子注入层薄层电阻的测定 直排四探针法
English:Test method for sheet resistance of silicon epitaxial, diffused and ion-implanted layers using a collinear four-probe array

Effective Date:2010-06-01
Regulatory Authority:National Standardization Administration of China
Issuing Regulatory Authority:General Administration of Quality Supervision, Inspection and Quarantine of the People’s Republic of China,National Standardization Administration of China

Adheres to international standards:N
PDF Downloadable:Y

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