GB/T 24578-2015 Test method for measuring surface metal contamination on silicon wafers by total reflection X-Ray fluorescence spectroscopy

Standard Number: GB/T 24578-2015
Chinese:硅片表面金属沾污的全反射X光荧光光谱测试方法
English:Test method for measuring surface metal contamination on silicon wafers by total reflection X-Ray fluorescence spectroscopy

Effective Date:2017-01-01
Regulatory Authority:National Standardization Administration of China
Issuing Regulatory Authority:General Administration of Quality Supervision, Inspection and Quarantine of the People’s Republic of China,National Standardization Administration of China

Adheres to international standards:N
PDF Downloadable:Y

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