GB/T 32814-2016 Silicon-based MEMS fabrication technology-Specification for criterion of the SOI wafer based MEMS process

Standard Number: GB/T 32814-2016
Chinese:硅基MEMS制造技术 基于SOI硅片的MEMS工艺规范
English:Silicon-based MEMS fabrication technology-Specification for criterion of the SOI wafer based MEMS process

Effective Date:2017-03-01
Regulatory Authority:National Standardization Administration of China
Issuing Regulatory Authority:General Administration of Quality Supervision, Inspection and Quarantine of the People’s Republic of China,National Standardization Administration of China

Adheres to international standards:N
PDF Downloadable:Y

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