Standard Number: GB/T 41064-2021
Chinese:表面化学分析 深度剖析 用单层和多层薄膜测定X射线光电子能谱、俄歇电子能谱和二次离子质谱中深度剖析溅射速率的方法
English:Surface chemical analysis-Depth profiling-Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films
Effective Date:2022-07-01
Regulatory Authority:National Standardization Administration of China
Issuing Regulatory Authority:State Administration for Market Supervision and Administration,National Standardization Administration of China
Adheres to international standards:Y
PDF Downloadable:N
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