GB/T 41153-2021 Determination of boron, aluminum and nitrogen impurity content in silicon carbide single crystal-Secondary ion mass spectrometry

Standard Number: GB/T 41153-2021
Chinese:碳化硅单晶中硼、铝、氮杂质含量的测定 二次离子质谱法
English:Determination of boron, aluminum and nitrogen impurity content in silicon carbide single crystal-Secondary ion mass spectrometry

Effective Date:2022-07-01
Regulatory Authority:National Standardization Administration of China
Issuing Regulatory Authority:State Administration for Market Supervision and Administration,National Standardization Administration of China

Adheres to international standards:N
PDF Downloadable:Y

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