GB/T 42902-2023 Test method for surface defects on silicon carbide epitaxial wafers-Laser scattering method

Standard Number: GB/T 42902-2023 (GB/T42902-2023)
Chinese:碳化硅外延片表面缺陷的测试 激光散射法
English:Test method for surface defects on silicon carbide epitaxial wafers-Laser scattering method

Effective Date:2024-03-01
Regulatory Authority:
National Standardization Administration of China

Issuing Regulatory Authority:State Administration for Market Supervision and Administration,National Standardization Administration of China

Adheres to international standards:N
PDF Downloadable:Y

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