GB/T 6616-2023 Test method for resistivity of semiconductor wafers and sheet resistance of semiconductor films-Noncontact eddy-current gauge

Standard Number: GB/T 6616-2023 (GB/T6616-2023)
Chinese:半导体晶片电阻率及半导体薄膜薄层电阻的测试 非接触涡流法
English:Test method for resistivity of semiconductor wafers and sheet resistance of semiconductor films-Noncontact eddy-current gauge

Effective Date:2024-03-01
Regulatory Authority:
National Standardization Administration of China

Issuing Regulatory Authority:State Administration for Market Supervision and Administration,National Standardization Administration of China

Adheres to international standards:N
PDF Downloadable:Y

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