Standard Number: YS/T 839-2012(YS/T839-2012)
Chinese:硅衬底上绝缘体薄膜厚度及折射率的椭圆偏振测试方法
English:Elliptical polarization test method for thickness and refractive index of insulator films on silicon substrates
Effective Date:2013-03-01
Standard Applicability:
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