Standard Number: YS/T 987-2021(YS/T987-2021)
Chinese:氯硅烷中碳含量的测定 气相色谱质谱联用法
English:Determination of carbon content in chlorosilanes by gas chromatography-mass spectrometry
Effective Date:2022-04-01
Standard Applicability:This document applies to the determination of carbon impurities in chlorosilanes (including methyl dichlorosilane, methyl trichlorosilane, dimethyl monochlorosilane, dimethyldichlorosilane, trimethyl monochlorosilane in chlorosilanes, collectively referred to as methyl chlorosilanes), the range of the determination (mass fraction) is 0.000 010% to 0.10%.
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